MgO vapor deposition material and method for preparation...

Details MgO vapor deposition material and method for preparation... MgO vapor deposition material and method for preparation...

2006-11-21

2006-11-21

Brunsman, David M. (Department: 1755)

Compositions: ceramic

Ceramic compositions

Refractory

C106S286600, C427S126300, C427S255190

Reexamination Certificate

active

07138350

ABSTRACT:
Polycrystals with a MgO purity of at least 99.0%, a relative density of at least 90.0%, a sulfur S content of 0.01 to 50 ppm, a chlorine Cl content of 0.01 to 50 ppm, a nitrogen N content of 0.01 to 200 ppm, and a phosphorus P content of 0.01 to 30 ppm. Even when vapor deposition is conducted using electron beam deposition, almost no splash occurs, and the film characteristics of the product MgO film can also be improved.

REFERENCES:
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patent: 2005/0264211 (2005-12-01), Kim
patent: 2005/0288169 (2005-12-01), Lee et al.
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patent: 11-213875 (1999-08-01), None
patent: 2000-63171 (2000-02-01), None

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