Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2005-04-05
2005-04-05
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S486000, C356S492000, C356S493000
Reexamination Certificate
active
06876453
ABSTRACT:
The instant invention is a method and apparatus for the measurement, with low uncertainty, of the six degrees of freedom of a first structure relative to a second structure. The apparatus is comprised of compact, rigid, thermally stable structures. The invention uses linear displacement transducers which have no active pointing to maintain a desired orientation of the linear displacement transducers with other parts of the measurement system.
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Evans Christopher James
Kuechel Michael
Van Doren Matthew
Brown Khaled
Caufield Francis J.
Toatley , Jr. Gregory J.
Zygo Corporation
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