Dynamic information storage or retrieval – Specific detail of information handling portion of system – Radiation beam modification of or by storage medium
Reexamination Certificate
2011-08-16
2011-08-16
Edun, Muhammad N (Department: 2627)
Dynamic information storage or retrieval
Specific detail of information handling portion of system
Radiation beam modification of or by storage medium
C369S112010, C250S50400H
Reexamination Certificate
active
08000212
ABSTRACT:
An extreme ultraviolet light system includes a drive laser system that produces an amplified light beam; a target material delivery system configured to produce a target material at a target location; a beam delivery system configured to receive the amplified light beam emitted from the drive laser system and to direct the amplified light beam toward the target location; and a metrology system. The beam delivery system includes converging lens configured and arranged to focus the amplified light beam at the target location. The metrology system includes a light collection system configured to collect a portion of the amplified light beam reflected from the converging lens and a portion of a guide laser beam reflected from the converging lens. The light collection system includes a dichroic optical device configured to optically separate the portions.
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Bergstedt Robert A.
Fomenkov Igor V.
Kim Nam-Hyong
Partlo William N.
Senekerimyan Vahan
Cymer Inc.
DiBerardino Law LLC
Edun Muhammad N
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