Metrology and registration system and method for...

Details Metrology and registration system and method for... Metrology and registration system and method for...

2011-07-05

2011-07-05

Thomas, Courtney (Department: 2882)

X-ray or gamma ray systems or devices

Specific application

Absorption

C378S206000

Reexamination Certificate

active

07974379

ABSTRACT:
A metrology system that uses an imaging system to monitor alignment features on the sample or sample holder of an X-ray laminography or tomography system. the metrology system has the capability to provide both sample shift and sample rotation movement data to a data acquisition system. These shift and rotation data can be used in alignment routines to produce 3D reconstructions from the X-ray images/projections. The metrology system is based on an imaging and focusing measurement of intrinsic feature of the sample or artificial features fabricated on the sample or sample holder.

REFERENCES:
patent: 2005/0069090 (2005-03-01), Rafaeli et al.

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