Metrological apparatus and calibration method therefor

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364560, 33551, H03M 106, G01D 534

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active

051503140

ABSTRACT:
A metrological apparatus for measuring form and texture of a surface employs an inductive transducer producing an AC gauge signal, and a tracking AC analogue to digital converter. In order to avoid errors in the output signal at a relatively high speed of traverse of the surface due to a non-flat frequency response of the converter, the output signal is processed by a digital filter to provide a combined frequency response which is flat over a desired range. In order to avoid errors in the output signal due to non-linearity of the transducer, a square or cubic correction is applied to the signal. A method calibrating the apparatus to obtain coefficients for the square and cube terms in the correction process is also described.

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patent: 4896282 (1990-01-01), Orwell
patent: 4912397 (1990-03-01), Gale et al.
patent: 5063291 (1991-11-01), Buehring

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