Methods using lasers to produce deposition of diamond thin films

Details Methods using lasers to produce deposition of diamond thin films Methods using lasers to produce deposition of diamond thin films

1991-10-08

1992-10-13

Padgett, Marianne

Coating processes

Direct application of electrical, magnetic, wave, or...

Electromagnetic or particulate radiation utilized

423446, B05D 306, B01J 306

Patent

active

051549450

ABSTRACT:
Infrared lasers are used to deposit diamond thin films onto a substrate. In one embodiment, the deposition of the film is from a gas mixture of CH.sub.4 and H.sub.2 that is introduced into a chemical vapor deposition chamber and caused to flow over the surface of the substrate to be coated while the laser is directed onto the surface. In another embodiment, pure carbon in the form of soot is delivered onto the surface to be coated and the laser beam is directed onto the surface in an atmosphere that prevents the carbon from being burned to CO.sub.2.

REFERENCES:
patent: 4849199 (1989-07-01), Pinneo
patent: 4892751 (1990-01-01), Miyake et al.
patent: 4938940 (1990-07-01), Hirose et al.
patent: 4981717 (1991-01-01), Thaler
patent: 5066515 (1991-11-01), Ohsawa

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