Etching a substrate: processes – Forming or treating electrical conductor article – Forming or treating of groove or through hole
Reexamination Certificate
2011-06-21
2011-06-21
Alanko, Anita K (Department: 1713)
Etching a substrate: processes
Forming or treating electrical conductor article
Forming or treating of groove or through hole
C216S041000, C216S049000, C216S055000, C216S058000, C216S083000, C438S694000, C438S700000, C438S947000
Reexamination Certificate
active
07964107
ABSTRACT:
Block copolymers can be self-assembled and used in methods as described herein for sub-lithographic patterning, for example. The block copolymers can be diblock copolymers, triblock copolymers, multiblock copolymers, or combinations thereof. Such methods can be useful for making devices that include, for example, sub-lithographic conductive lines.
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Alanko Anita K
Micro)n Technology, Inc.
Wells St. John P.S.
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