Methods using a peroxide-generating compound to remove group...

Details Methods using a peroxide-generating compound to remove group... Methods using a peroxide-generating compound to remove group...

2005-06-14

2005-06-14

Chen, Kin-Chan (Department: 1765)

Semiconductor device manufacturing: process

Chemical etching

Liquid phase etching

C438S754000, C134S003000

Reexamination Certificate

active

06905974

ABSTRACT:
A method for cleaning substrates to remove Group VIII metal-containing, particularly platinum-containing, residue using a cleaning composition that includes a peroxide-generating compound.

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