Methods to reduce polarization dependent loss in planar...

Details Methods to reduce polarization dependent loss in planar... Methods to reduce polarization dependent loss in planar...

2006-02-09

2008-09-02

Wong, Tina M (Department: 2874)

Optical waveguides

Integrated optical circuit

C385S011000, C385S015000

Reexamination Certificate

active

07421156

ABSTRACT:
Polarization dependent loss may be reduced by providing at least one dummy waveguide or at least one dummy metal structure. Polarization dependent loss may also be reduced by imposing a mechanical force on the OIC to exert mechanical stress thereby changing at least one of the birefringence and the optical axes of at least one waveguide. And polarization dependent loss may be reduced by forming a metal heater using a first set of metal deposition parameters; forming a conductive metal structure contacting the metal heater using a second set of metal deposition parameters; and selecting the first set of metal deposition parameters and the second set of metal deposition parameters to reduce stress.

REFERENCES:
patent: 6222974 (2001-04-01), Nagata
patent: 6240221 (2001-05-01), Thompson
patent: 6243517 (2001-06-01), Deacon
patent: 6278168 (2001-08-01), Day
patent: 6885795 (2005-04-01), Hsu et al.
patent: 7003198 (2006-02-01), Doerr
patent: 2005/0013576 (2005-01-01), Chhabra et al.
patent: 2005/0213887 (2005-09-01), Balakrishnan et al.

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