Methods to make piezoelectric ceramic thick film arrays and...

Metal working – Piezoelectric device making

Reexamination Certificate

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C029S831000, C029S846000, C029S423000, C310S340000, C310S328000, C438S455000

Reexamination Certificate

active

07089635

ABSTRACT:
A method of producing at least one piezoelectric element includes depositing a piezoelectric ceramic material onto a surface of a first substrate to form at least one piezoelectric element structure. Then an electrode is deposited on a surface of the at least one piezoelectric element structure. Next, the at least one piezoelectric element structure is bonded to a second substrate, the second substrate being conductive or having a conductive layer. The first substrate is then removed from the at least one piezoelectric element structure and a second side electrode is deposited on a second surface of the at least one piezoelectric element structure. A poling operation is performed to provide the at least one piezoelectric element structure with piezoelectric characteristics.

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