Metal working – Piezoelectric device making
Reexamination Certificate
2006-08-15
2006-08-15
Trinh, Minh (Department: 3729)
Metal working
Piezoelectric device making
C029S831000, C029S846000, C029S423000, C310S340000, C310S328000, C438S455000
Reexamination Certificate
active
07089635
ABSTRACT:
A method of producing at least one piezoelectric element includes depositing a piezoelectric ceramic material onto a surface of a first substrate to form at least one piezoelectric element structure. Then an electrode is deposited on a surface of the at least one piezoelectric element structure. Next, the at least one piezoelectric element structure is bonded to a second substrate, the second substrate being conductive or having a conductive layer. The first substrate is then removed from the at least one piezoelectric element structure and a second side electrode is deposited on a second surface of the at least one piezoelectric element structure. A poling operation is performed to provide the at least one piezoelectric element structure with piezoelectric characteristics.
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Buhler Steven A.
Elrod Scott A.
Fitch John S.
Littau Karl A.
Solberg Scott E.
Fay Sharpe Fagan Minnich & McKee LLP
Palo Alto Research Center Incorporated
Trinh Minh
LandOfFree
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