Methods to make diffractive optical elements

Details Methods to make diffractive optical elements Methods to make diffractive optical elements

2005-09-20

2005-09-20

Thompson, Timothy (Department: 2873)

Optical: systems and elements

Lens

With multipart element

C359S741000, C216S024000, C216S026000

Reexamination Certificate

active

06947224

ABSTRACT:
A method for forming a diffractive lens includes forming an etch stop layer on a first surface of a silicon substrate, forming a diffractive optical element above the etch stop layer, forming a planarization layer covering the diffractive optical element, planarizing the planarization layer, forming a bonding layer on the planarization layer, bonding a transparent substrate on the bonding layer, and etching a second surface of the silicon substrate to the etch stop layer to remove a portion of the silicon substrate opposite the diffractive optical element, wherein the remaining portion of the silicon substrate forms a bonding ring.

REFERENCES:
patent: 6187211 (2001-02-01), Smith et al.
patent: 6599666 (2003-07-01), Rolfson
Chien Chieh Lee et al., “Silicon-Based Transmissive Diffractive Optical Element”, Optics Letters, vol. 28, No. 14, Jul. 15, 2003, Optical Society of America, pp. 1260-1262.
U.S. Appl. No. 10/210,598, filed Jul. 31, 2002, entitled “Optical Fiber Coupler Having A Relaxed Alignment Tolerance,” inventor Christopher L. Coleman, 17 pages.

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