Methods to control the environment and exposure apparatus

Details Methods to control the environment and exposure apparatus Methods to control the environment and exposure apparatus

1997-03-26

1999-12-14

Williams, Hezron

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Mechanical measurement system

36452815, 2504922, 355 30, 355 53, 355 55, 355 77, G01K 1116, G03B 2752, G03B 2742

Patent

active

060029870

ABSTRACT:
An exposure apparatus includes an exposure system which transfers a pattern of a mask onto a substrate; a chamber in which the exposure system is housed; an air-conditioner which is associated with the chamber and which air-conditions the chamber; and a noise eliminating device which is arranged between the exposure system and the air-conditioner and which eliminates at least a portion of the noise components near a resonant frequency of the exposure system from noise that is generated in the air-conditioner.

REFERENCES:
patent: 4989031 (1991-01-01), Kamiya
patent: 5155523 (1992-10-01), Hara et al.
patent: 5430303 (1995-07-01), Matsumoto et al.
patent: 5508518 (1996-04-01), Kendall
patent: 5526292 (1996-06-01), Hodgson et al.
patent: 5638304 (1997-06-01), Billoud

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