Optics: measuring and testing – By light interference – For refractive indexing
Reexamination Certificate
2009-12-09
2011-12-13
Lyons, Michael A (Department: 2877)
Optics: measuring and testing
By light interference
For refractive indexing
Reexamination Certificate
active
08077325
ABSTRACT:
Structure profiles from optical interferometric data can be identified by obtaining a plurality of broadband interferometric optical profiles of a structure as a function of structure depth in an axial direction. Each of the plurality of interferometric optical profiles include a reference signal propagated through a reference path and a sample signal reflected from a sample reflector in the axial direction. An axial position corresponding to at least a portion of the structure is selected. Phase variations of the plurality of interferometric optical profiles are determined at the selected axial position. A physical displacement of the structure is identified based on the phase variations at the selected axial position.
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Choma Michael
Ellerbee Audrey
Izatt Joseph A.
Sarunic Marinko
Duke University
Lyons Michael A
Myers Bigel & Sibley & Sajovec
Richey Scott
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