Methods of sputtering cadmium sulfide layers for use in...

Details Methods of sputtering cadmium sulfide layers for use in... Methods of sputtering cadmium sulfide layers for use in...

2011-05-17

2011-05-17

Brewster, William M. (Department: 2823)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to electromagnetic radiation

C438S095000

Reexamination Certificate

active

07943415

ABSTRACT:
Methods are generally provided of sputtering a cadmium sulfide layer on a substrate. The cadmium sulfide layer can be sputtered on a substrate from a target in a sputtering atmosphere, wherein the target comprises about 75% to about 100% by weight cadmium, and wherein the sputtering atmosphere comprises a sulfur-containing source gas. The cadmium sulfide layer can be used in methods of forming cadmium telluride thin film photovoltaic devices.

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