Methods of reducing CD loss in a microelectromechanical device

Details Methods of reducing CD loss in a microelectromechanical device Methods of reducing CD loss in a microelectromechanical device

2011-01-04

2011-01-04

Le, Thao (Department: 2818)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to electromagnetic radiation

C438S032000

Reexamination Certificate

active

07863079

ABSTRACT:
Methods of fabricating an electromechanical systems device that minimize critical dimension (CD) loss in the device are described. The methods provide electromechanical systems devices with improved properties, including high reflectivity.

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