Metal working – Piezoelectric device making
Reexamination Certificate
2006-12-26
2006-12-26
Tugbang, A. Dexter (Department: 3729)
Metal working
Piezoelectric device making
C029S890100, C029S412000, C029S417000, C310S311000, C310S364000, C310S366000, C083S039000
Reexamination Certificate
active
07152290
ABSTRACT:
Methods for manufacturing a piezoelectric actuator and a liquid ejecting head. In particular, a substrate, which is to be a vibration plate actuated by a piezoelectric element is prepared. A plurality of chip regions are defined on the substrate. A first common electrode of the piezoelectric element is formed on the substrate. A first piezoelectric layer of the piezoelectric element is formed on the first common electrode. A drive electrode of the piezoelectric element is formed on the first piezoelectric layer. A second piezoelectric layer of the piezoelectric element is formed on the drive electrode. A second common electrode of the piezoelectric element is formed on the second piezoelectric layer. Then, the substrate is cut so as to divide the chip regions from one another. In the aforementioned aspects of the invention, the first and second common electrodes as well as the drive electrode are formed so as not to extend beyond the outline of each of the chip regions.
REFERENCES:
patent: 5640760 (1997-06-01), Val et al.
patent: 5692280 (1997-12-01), Taniguchi et al.
patent: 6504287 (2003-01-01), Yun et al.
patent: 02-289352 (1990-11-01), None
patent: 03-128681 (1991-05-01), None
patent: 5-183269 (1993-07-01), None
patent: 09-277531 (1997-10-01), None
patent: 09-323410 (1997-12-01), None
patent: 10-034924 (1998-02-01), None
patent: 11-005305 (1999-01-01), None
patent: 2000-077438 (2000-03-01), None
patent: 2000-141647 (2000-05-01), None
patent: 2000-332313 (2000-11-01), None
patent: 2001-077438 (2001-03-01), None
patent: WO 02/073710 (2002-09-01), None
Fuda et al., “Ceramic Actuator with Three-Dimensional Electrode Structure”, Proceedings of the 8th IEEE International Syposium on Applications of Ferroelectrics, 1992, Aug. 1992, pp. 573-576.
Junhua Chang
Katakura Takahiro
Okumura Motonori
Seiko Epson Corporation
Sughrue & Mion, PLLC
Tugbang A. Dexter
LandOfFree
Methods of manufacturing a piezoelectric actuator and a... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Methods of manufacturing a piezoelectric actuator and a..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Methods of manufacturing a piezoelectric actuator and a... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3662206