Methods of making vertical microelectronic field emission device

Details Methods of making vertical microelectronic field emission device Methods of making vertical microelectronic field emission device

1995-09-13

1997-07-15

Bradley, P. Austin

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

442 50, H01J 130, H01J 902

Patent

active

056477856

ABSTRACT:
A vertical microelectronic field emitter is formed by first forming tips on the face of a substrate and then forming trenches in the substrate around the tips to form columns in the substrate, with the tips lying on top of the columns. The trenches are filled with a dielectric and a conductor layer is formed on the dielectric. Alternatively, trenches may be formed in the face of the substrate with the trenches defining columns in the substrate. Then, tips are formed on top of the columns. The trenches are filled with dielectric and the conductor layer is formed on the dielectric to form the extraction electrodes.

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