Powder metallurgy processes – Powder metallurgy processes with heating or sintering – Consolidation of powder prior to sintering
Reexamination Certificate
2005-10-20
2010-11-23
Wyszomierski, George (Department: 1793)
Powder metallurgy processes
Powder metallurgy processes with heating or sintering
Consolidation of powder prior to sintering
C075S245000
Reexamination Certificate
active
07837929
ABSTRACT:
Molybdenum titanium sputter targets are provided. In one aspect, the targets are substantially free of the β(Ti, Mo) alloy phase. In another aspect, the targets are substantially comprised of single phase β(Ti, Mo) alloy. In both aspects, particulate emission during sputtering is reduced. Methods of preparing the targets, methods of bonding targets together to produce large area sputter targets, and films produced by the targets, are also provided.
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Gaydos Mark
Kumar Prabhat
Miller Steven A.
Mills Norman C.
Rozak Gary
Connolly Bove & Lodge & Hutz LLP
H.C. Starck Inc.
Wyszomierski George
Zhu Weiping
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