Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2006-08-08
2006-08-08
Tugbang, A. Dexter (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S603120, C029S603130, C029S603150, C029S603180, C360S122000
Reexamination Certificate
active
07086139
ABSTRACT:
A pedestal is formed over a first pole piece layer and insulator materials are formed to surround it. A gap layer made of a non-magnetic insulator or metal is then formed over the pedestal and the insulator, followed by the optional formation of a seed layer. A second pole piece is formed over the gap layer with or without the seed layer by forming a patterned resist using E-beam lithography and electroplating second pole piece materials within the patterned resist. After milling to remove side portions of the gap layer and the optional seed layer, a chemical etch is performed to remove a top portion of the insulator materials. The pedestal is then notched and trimmed by ion milling using the second pole piece as a mask to form a central notched structure. Since the second pole piece is precisely centered over the pedestal prior to notching, the pedestal is notched symmetrically to form a notched structure having side walls with angled slopes.
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Lee Kim Y.
Lo Jyh-Shuey (Jerry)
Hitachi Global Storage Technologies - Netherlands B.V.
Nadar Rambod
Nguyen Tai
Oskorep, Esq. John J.
Tugbang A. Dexter
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