Powder metallurgy processes – Powder metallurgy processes with heating or sintering – Powder pretreatment
Patent
1995-10-30
1998-07-07
Jenkins, Daniel J.
Powder metallurgy processes
Powder metallurgy processes with heating or sintering
Powder pretreatment
419 49, 419 23, B22F 100, B22F 314
Patent
active
057783020
ABSTRACT:
Methods for making Cr-Me sputter targets wherein Me is a metal are disclosed. Preferably Me is a transition metal and most preferably is a member selected from the group consisting of Cu, Fe, and V. As a first step in the method, Cr and Me powder or crystals on the order of less than 100 mesh are provided. Preferably, the powders or crystals have a size of about 6-8 mesh. The Cr is present in a weight ratio amount of at least 50% Cr based upon the total combined weight of Cr and Me present. The Cr and Me components are then mechanically alloyed in a high energy ball mill or the like so as to provide an intimate mixture of powdered Cr-Me. The resulting powder is screened with, for example, a -20 -70 mesh screen, and then subjected to hot isostatic pressing (HIP) conditions to consolidate the powders at pressures of about 10,000 to 45,000 psi and temperatures of 800.degree. C. to 1500.degree. C. for about 1/4 to 5 hours. The HIP can is then opened, and the resulting consolidated mass or billet is cut and machined into the desired target size and shape.
REFERENCES:
patent: 4126451 (1978-11-01), Nayar
patent: 4135286 (1979-01-01), Wright et al.
patent: 4277540 (1981-07-01), Aine
patent: 4331476 (1982-05-01), Helderman et al.
patent: 4411963 (1983-10-01), Aine
patent: 4552820 (1985-11-01), Lin et al.
patent: 4652499 (1987-03-01), Howard
patent: 4654276 (1987-03-01), Ahlert et al.
patent: 4663120 (1987-05-01), Parent et al.
patent: 4677032 (1987-06-01), Robinson
patent: 4750932 (1988-06-01), Parent et al.
patent: 4915805 (1990-04-01), Rust
patent: 4963240 (1990-10-01), Fukasawa et al.
patent: 5053250 (1991-10-01), Baseman et al.
patent: 5220349 (1993-06-01), Salta et al.
patent: 5282943 (1994-02-01), Lannutti et al.
patent: 5282946 (1994-02-01), Kinoshita et al.
patent: 5334267 (1994-08-01), Taniquchi et al.
patent: 5338422 (1994-08-01), Belkind et al.
patent: 5342496 (1994-08-01), Stellrecht
patent: 5359352 (1994-10-01), Salta et al.
ASM Handbook, vol. 7, Powder Metallurgy, 1984, pp. 215, 722-727.
"Reactive Mechanical Alloys in Material Synthesis", E. Ivanov, Journal of Materials Synthesis and Processing, vol. 1, No. 6, 1993, pp. 405-413.
"5 Mechanical Milling and Alloying", Carl C. Koch, Materials Science and Engineering Department, North Carolina State University.
Material Science and Technology, vol. 15, Chapter 5, pp. 194-245, 1991.
Jenkins Daniel J.
Tosoh SMD, Inc.
LandOfFree
Methods of making Cr-Me sputter targets and targets produced the does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Methods of making Cr-Me sputter targets and targets produced the, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Methods of making Cr-Me sputter targets and targets produced the will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1217421