Methods of making a three terminal magnetic sensor having a...

Details Methods of making a three terminal magnetic sensor having a... Methods of making a three terminal magnetic sensor having a...

2006-07-04

2006-07-04

Coleman, W. David (Department: 2823)

Semiconductor device manufacturing: process

Having magnetic or ferroelectric component

C257SE21561, C257SE21563

Reexamination Certificate

active

07071010

ABSTRACT:
In one illustrative example, a three terminal magnetic sensor includes a collector region made of a semiconductor material, a base region, and an emitter region. An insulator layer is formed between the collector region and a carrier substrate body which carries the three terminal magnetic sensor. The insulator layer serves to reduce a capacitance otherwise present between the collector region and magnetic media at a magnetic field sensing plane of the three terminal magnetic sensor. Thus, the insulator layer electrically isolates the collector region from the carrier substrate body. The structure may be formed through use of a separation by implanting oxygen (SIMOX) technique or a wafer-bonding technique, as examples.

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