Methods of forming waveguides and waveguides formed therefrom

Optical waveguides – Having particular optical characteristic modifying chemical... – Of waveguide core

Reexamination Certificate

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C385S141000, C385S129000, C430S321000

Reexamination Certificate

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07024093

ABSTRACT:
Provided are methods of forming optical waveguides. The methods involve: (a) forming over a substrate a layer of a photodefinable composition; (b) exposing a portion of the layer to actinic radiation; (c) developing the exposed layer to form a waveguide core structure; and (d) heating the waveguide core structure to a temperature and for a time effective to reflow the structure such that it becomes at least partially rounded in cross-section. Also provided are optical waveguides formed from the described methods and electronic devices including one or more of the optical waveguides.

REFERENCES:
patent: 5064266 (1991-11-01), Sun et al.
patent: 5200487 (1993-04-01), Lagarde et al.
patent: 5230990 (1993-07-01), Iwasaki et al.
patent: 5378585 (1995-01-01), Watanabe
patent: 5439782 (1995-08-01), Haemmerle et al.
patent: 5534101 (1996-07-01), Keyworth et al.
patent: 5554465 (1996-09-01), Watanabe
patent: 5612170 (1997-03-01), Takemura et al.
patent: 5672672 (1997-09-01), Amano et al.
patent: 5761364 (1998-06-01), Knapp et al.
patent: 5846694 (1998-12-01), Strand et al.
patent: 6054253 (2000-04-01), Fardad et al.
patent: 6087064 (2000-07-01), Lin et al.
patent: 6088492 (2000-07-01), Kaneko et al.
patent: 6144795 (2000-11-01), Dawes et al.
patent: 6272275 (2001-08-01), Cortright et al.
patent: 6319551 (2001-11-01), Risen, Jr. et al.
patent: 6344305 (2002-02-01), Lin et al.
patent: 6731857 (2004-05-01), Shelnut et al.
patent: 2001/0007732 (2001-07-01), Iwasaki et al.
patent: 0 543 761 (1993-05-01), None
patent: 0 691 554 (1996-01-01), None
patent: 0709434 (1996-05-01), None
patent: 1 037 073 (2000-09-01), None
patent: 1 251 155 (2002-10-01), None
patent: 2 346 452 (2000-08-01), None
patent: 57-168246 (1982-10-01), None
patent: 58-096654 (1983-06-01), None
patent: 63-279245 (1988-11-01), None
patent: 03-015805 (1991-01-01), None
patent: 04-271306 (1992-09-01), None
patent: 04-366958 (1992-12-01), None
patent: 1993-210020 (1993-08-01), None
patent: 6-172533 (1994-06-01), None
patent: 06-172533 (1994-06-01), None
patent: 1994-174952 (1994-06-01), None
patent: 1994-194533 (1994-07-01), None
patent: 6-256523 (1994-09-01), None
patent: 8-259895 (1996-10-01), None
patent: 8-304644 (1996-11-01), None
patent: 8-327842 (1996-12-01), None
patent: 10-148729 (1998-06-01), None
patent: 10-253845 (1998-09-01), None
patent: 1999-326665 (1999-11-01), None
patent: 2000-056148 (2000-02-01), None
patent: 31 33039 (2000-11-01), None
patent: 2000-307090 (2000-11-01), None
patent: 2001-042150 (2001-02-01), None
patent: 2002-116335 (2002-04-01), None
patent: 2002-202426 (2002-07-01), None
patent: 2002-258085 (2002-09-01), None
patent: 2003-3048984 (2003-02-01), None
patent: WO 98/26315 (1998-06-01), None
Syms et al., “Reflow and Burial of Channel Waveguides Formed in Sol-Gel Glass on Si-Substrates”; IEEE Photonics Technology Letters, vol. 5, No. 9, Sep. 1993, pp. 1077-1079.
Sun et al., “Silica-Based Circular Cross-Sectioned Channel Waveguides”; IEEE Photonics Technology Letters, vol. 3, No. 3, Mar. 1991, pp. 238-240.
Bagley et al., “The Processing and Use of Organosilicon Polymers for Photonic Applications”; Polymer Engineering and Science, Mid-Sep. 1989, vol. 29, No. 17, pp. 1197-1199.
Brault et al., “Bilevel Polysiloxane Resist for Ion-Beam and Electron-Beam Lithography”; SPIE vol. 539 Advances in Resist Technology and Processing II (1985); pp. 70-73.

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