Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate
2005-04-01
2008-11-25
Rosasco, Stephen (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
C430S311000
Reexamination Certificate
active
07455938
ABSTRACT:
The invention includes methods of forming a pattern in a substrate. A feature location is defined where a square corner is desired to be patterned into the substrate. A mask is generated which is to be utilized in creating a substantially square corner at the feature location. The mask has a linear sub-resolution component extending across the feature location. Radiation is provided through the mask to pattern the substantially square corner at the feature location.
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Micro)n Technology, Inc.
Rosasco Stephen
Wells St. John P.S.
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