Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate
2006-06-06
2006-06-06
Mulpuri, Savitri (Department: 2812)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
C438S052000
Reexamination Certificate
active
07056757
ABSTRACT:
Processing techniques are disclosed for batch fabrication of microstructures comprising an oxide mask on a substrate with submicron openings formed therein, and microstructures having deep-submicron, high aspect-ratio etched trenches, using conventional optical photolithography. Exemplary high aspect-ratio etched-trench microstructures that may be produced include single crystal resonators and sensors.
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Abdolvand Reza
Anaraki Siavash P.
Ayazi Farrokh
Float Kenneth W.
Georgia Tech Research Corporation
Mulpuri Savitri
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