Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Metallic housing or support
Reexamination Certificate
2005-07-19
2005-07-19
Nelms, David (Department: 2818)
Semiconductor device manufacturing: process
Packaging or treatment of packaged semiconductor
Metallic housing or support
C257S714000, C257S717000
Reexamination Certificate
active
06919231
ABSTRACT:
A method of forming channels on a die or other substrate. Also disclosed are liquid cooling systems including such channels.
REFERENCES:
patent: 6605525 (2003-08-01), Lu et al.
Youngcheol Joo et al, Fabrication of Monolithic Microchannels For IC Chip Cooling, 1995 IEEE, pp. 362-367.
Cheng Chin Chang
Myers Alan M.
Ramanathan Shriram
Lee Calvin
Nelms David
Tweet Kerry D.
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