Methods of forming capacitors of semiconductor devices...

Details Methods of forming capacitors of semiconductor devices... Methods of forming capacitors of semiconductor devices...

2006-12-26

2006-12-26

Geyer, Scott B. (Department: 2812)

Semiconductor device manufacturing: process

Making passive device

Planar capacitor

C257SE21008

Reexamination Certificate

active

07153750

ABSTRACT:
A capacitor of a semiconductor device includes a cylinder type capacitor lower electrode, a dielectric layer, and an upper electrode. The upper electrode includes a metallic layer on the dielectric layer and a doped polySi1-xGexlayer stacked on the metallic layer. Methods of forming these capacitors also are provided.

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