Methods of forming active matrix display devices with reduced su

Details Methods of forming active matrix display devices with reduced su Methods of forming active matrix display devices with reduced su

1997-10-14

1999-06-29

Nguyen, Tiep H.

Liquid crystal cells, elements and systems

Particular excitation of liquid crystal

Electrical excitation of liquid crystal

349138, 257 59, 257 72, G02F 1136, G02F 11333

Patent

active

059175648

ABSTRACT:
Methods of forming active matrix display devices with reduced susceptibility to image sticking include the steps of forming a gate electrode on a face of a substrate and then forming a first insulating layer on the gate electrode and on the face to electrically isolate the gate electrode from adjacent regions. A first amorphous semiconductor layer is then formed on the first insulating layer. In particular, the first amorphous semiconductor layer, which acts as the active region of the TFT, is patterned to extend opposite the gate electrode. A channel protection layer is also formed on the first amorphous semiconductor layer. The channel protection layer is designed to protect the channel portion of the active region in the first amorphous semiconductor layer from potential damage which may occur during subsequent process steps. Then, the first insulating layer and the channel protection layer are etched simultaneously until the face of the substrate is exposed. Here, the step of forming a gate electrode includes the steps of forming a first conductive layer having a thickness of about 2000 .ANG. on the face of the substrate and then patterning the first conductive layer to define a gate electrode of a thin-film transistor and a common electrode. The first insulating layer is then formed on the gate electrode and the common electrode, but is subsequently removed from the common electrode to reduce image-sticking effects which may impair display performance in in-plane switching (IPS) TFT-LCD display devices.

REFERENCES:
patent: 5471330 (1995-11-01), Sarma
patent: 5610737 (1997-03-01), Akiyama et al.
patent: 5731856 (1998-03-01), Kim et al.
patent: 5734451 (1998-03-01), Yanagawa et al.
patent: 5760857 (1998-06-01), Yanagawa et al.

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