Methods of fabricating thin film structures by imaging through t

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Screen other than for cathode-ray tube

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430 5, 430312, 430322, G03F 900

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active

053588096

ABSTRACT:
A method of fabricating thin film structures on the surface of a transparent substrate (10) in which a light shielding pattern (20, 54) is provided adjacent the opposing substrate surface and in which deposited thin film layers are photolithographically patterned by directing radiation onto the light shielding pattern and by varying the angle of the exposing radiation for respective layers whereby the thin film layers are patterned differently while using the same light shielding pattern. Various thin film structures can be fabricated inexpensively and reliably using this approach together with standard processing techniques such as the use of temporary layers and lift-off procedures. In particular, by appropriate design of the light shielding pattern and selection of deposited materials, active matrix arrays, e.g. comprising MIMs or TFTs with associated conductors, for use in liquid crystal display devices can be produced. The light shielding pattern can be formed directly on the substrate enabling pliable substrates to be used.

REFERENCES:
patent: 4683183 (1987-07-01), Ono
patent: 4820612 (1989-04-01), Mose et al.
patent: 5169737 (1992-12-01), Haws

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