Methods of fabricating nanoscale-to-microscale structures

Chemistry of inorganic compounds – Oxygen or compound thereof – Metal containing

Reexamination Certificate

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C423S335000, C423S339000, C423S325000, C423S155000, C423S179000, C428S328000, C428S407000, C428S156000, C428S423100, C428S447000, C516S022000, C516S020000, C257S009000, C257S202000, C438S689000

Reexamination Certificate

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07615206

ABSTRACT:
Methods for the production of shaped nanoscale-to-microscale structures, wherein a nanoscale-to-microscale template is provided having an original chemical composition and an original shape, and the nanoscale-to-microscale template subjected to a chemical reaction, so as to partially or completely convert the nanoscale-to-microscale template into the shaped nanoscale-to-microscale structure having a chemical composition different than the original chemical composition and having substantially the same shape as the original shape, being a scaled version of the original shape. The shaped nanoscale-to-microscale structure formed comprises an element (such as silicon), a metallic alloy (such as a silicon alloy), or a non-oxide compound (such as silicon carbide or silicon nitride).

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