Methods of fabricating multilevel leadframes and...

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Metallic housing or support

Reexamination Certificate

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Reexamination Certificate

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06780680

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a leadframe structure used for making electrical connections to a semiconductor device. More particularly, the present invention relates to a multilevel leadframe configuration for improving reliability and performance by reducing the number of wires that must extend over or “jump” a bus bar in a lead-over-frame configuration.
2. State of the Art
A typical semiconductor chip is generally constructed from a semiconductor die which is in electrical communication with a component known as a leadframe. The semiconductor die and leadframe are usually sealed in an encapsulant, such as a transfer-molded plastic (filled polymer), wherein portions of the leadframe extend from the encapsulant to ultimately, after fitting and trimming, form electrical communication between the semiconductor die and external circuitry, such as a printed circuit board (“PCB”) or the like.
The leadframe is typically formed from a single continuous sheet of metal by a metal stamping or etching operation. As shown in
FIG. 15
, a conventional leadframe
200
generally consists of an outer supporting frame
202
, a central semiconductor chip or “die attach” supporting pad
204
and a plurality of lead fingers
206
, each lead finger
206
extending toward the central semiconductor chip supporting pad
204
. Ultimately, the outer supporting frame
202
of the leadframe
200
is removed after wire bonds are connected between contact pads of a semiconductor die (not shown) and the lead fingers
206
.
As shown in
FIG. 16
(components common to
FIG. 15
retain the same numeric designation), a semiconductor die
208
having a plurality of bond pads
210
is secured to the central semiconductor chip supporting pad
204
(such as by solder or epoxy die-attach material, or a double-sided adhesive film). The leadframe
200
, with the semiconductor die
208
attached thereon, is placed into a wire bonding apparatus including a clamp assembly for holding the leadframe and die assembly, as well as clamping the lead fingers
206
for bonding (not shown). Bond wires
212
of gold, aluminum, or other metals and alloys known in the art are attached, one at a time, from each bond pad
210
on the semiconductor die
208
and to its corresponding lead finger
206
. The bond wires
212
are generally attached through one of three industry-standard wire bonding techniques, depending on the wire material employed: ultrasonic bonding—using a combination of pressure and ultrasonic vibration bursts to form a metallurgical cold weld; thermocompression bonding—using a combination of pressure and elevated temperature to form a weld; and thermosonic bonding—using a combination of pressure, elevated temperature, and ultrasonic vibration bursts. After wire bonding, the assembly can be encapsulated as discussed above.
U.S. Pat. No. 4,862,245 issued Aug. 29, 1989 to Pashby et al. (the “Pashby patent”) illustrates a so-called “leads over chip” arrangement (“LOC”) on the semiconductor die. As shown in
FIG. 17
, in an LOC arrangement
300
, a plurality of lead fingers
302
extends over the active surface of a semiconductor die
304
toward a line of bond pads
306
wherein bond wires
308
make the electrical connection between the lead fingers
302
and the bond pads
306
. An alpha barrier
310
, such as a polyimide (for example, Kapton™) film, is adhered between the semiconductor die
304
and the lead fingers
302
. The LOC configuration as exemplified by the Pashby patent eliminates the use of the previously-referenced central die attach pad, may assist in limiting the ingress of corrosive environment contaminants, achieves a larger portion of the lead finger path length encapsulated in the packaging material, reduces electrical resistance caused by the bond wires (i.e., the longer the bond wire, the higher the resistance), and reduces the potential for wire sweep problems aggravated by long wire loops.
In a conventional configuration (non-LOC), some of the lead fingers carry input or output signals to or from the semiconductor die while others provide a power source or a ground. In an LOC configuration, the lead fingers likewise provide the input or output signals to or from the semiconductor device, but the power source and ground are typically provided by bus bars. The bus bars form an elongated contact in close proximity to the bond pads and typically lie in a perpendicular orientation to the other lead fingers. It is, of course, understood that the bus bars can also carry an input or an output signal which is usually common to more than one bond pad.
A conventional LOC configuration of an integrated circuit chip package
400
, including bus bars, is shown in
FIG. 18. A
semiconductor die
402
is housed within the integrated circuit chip package
400
. A leadframe
404
includes a plurality of lead fingers
406
and
408
extending over the surface of the die toward bond pads
410
. The leadframe
404
also includes bus bars
412
and
414
. The bus bars
412
and
414
and the lead fingers
406
and
408
are connected to the bond pads
410
by bond wires
416
. One problem with the conventional LOC configuration is that the bond wires
416
must jump or cross over the bus bars
412
and
414
in order to make their respective connections with the bond pads
410
. This jumping gives rise to the possibility of shorting between the lead fingers
406
and
408
and the bus bars
412
and
414
. In addition, the bond wires
416
must be of extended length to jump the bus bars
412
and
414
. This additional bond wire length also adds undesirable inductance and capacitance to the signals, potentially degrading the electrical performance of the semiconductor device. Moreover, the height of the bond wires
416
jumping over the bus bars
412
and
414
are also problematic for thin profile semiconductor packages, such as TSOPs (thin, small outline packages). The bond wires
416
may actually extend out of the encapsulant material used to protect such thin profile semiconductor packages.
U.S. Pat. No. 4,796,078 issued Jan. 3, 1989 to Phelps, Jr. et al. illustrates a multi-layered leadframe assembly. A semiconductor die is bonded to a recess in a first, lower leadframe. Wire bonds extend from lead fingers of the first leadframe terminating short of the sides of the die to peripheral bond pads. A second, upper leadframe of an LOC configuration is secured to the top of the semiconductor die and the first leadframe with an adhesive tape. The lead fingers of the second leadframe extending over the die have selected wire bonds made to central terminals by bond wires. Thus, it appears that LOC technology is integrated with a conventional peripheral-lead attachment. One problem with this type of configuration is that it requires a central die attach pad that was essentially eliminated by use of LOC technology.
U.S. Pat. No. 5,461,255 issued Oct. 24, 1995 to Chan et al. also illustrates a multi-layered leadframe assembly. As shown in
FIG. 19
, the Chan type of main leadframe
500
comprising a plurality of leads
502
is adhered to the active face
504
of an integrated circuit chip
506
by an insulating adhesive tape strip
508
. A bus leadframe
510
comprising a plurality of conductive leads
512
is then adhered to the opposite, upper side of the main leadframe
500
by an insulating adhesive tape strip
514
. The selected leads
502
of the main leadframe
500
are welded at spot welds
516
to the selective leads
512
of the bus leadframe
510
. The selective leads
502
of the main leadframe
500
are electrically connected at their inner ends to bond pads
518
on the integrated circuit chip
504
by tab bonds
520
. Alternatively, wire bonds may be used. This configuration suffers from at least one disadvantage in that the bus leadframe
510
comprises a plurality of conductive leads
512
which are connected at their ends to select leads
502
of the main leadframe
500
at spot welds
516
. Thus, a plurality of leads of the main leadframe is requ

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