Metal treatment – Process of modifying or maintaining internal physical... – Heating or cooling of solid metal
Reexamination Certificate
2005-06-21
2005-06-21
King, Roy (Department: 1742)
Metal treatment
Process of modifying or maintaining internal physical...
Heating or cooling of solid metal
C148S689000, C072S231000, C072S256000
Reexamination Certificate
active
06908517
ABSTRACT:
The invention includes a physical vapor deposition target composed of a face centered cubic unit cell metal or alloy and having a uniform grain size less than 30 microns, preferably less than 1 micron; and a uniform axial or planar <220> texture. Also described is a method for making sputtering targets. The method can comprise billet preparation; equal channel angular extrusion with a prescribed route and number of passes; and cross-rolling or forging subsequent to the equal channel angular extrusion.
REFERENCES:
patent: 5087297 (1992-02-01), Pouliquen
patent: 5590389 (1996-12-01), Dunlop et al.
patent: 5988262 (1999-11-01), Hasegawa et al.
patent: 6086725 (2000-07-01), Abburi et al.
patent: 6139701 (2000-10-01), Pavate et al.
patent: 6197134 (2001-03-01), Kanzaki et al.
patent: 6238494 (2001-05-01), Segal
patent: WO 01/94660 (2001-12-01), None
Callister, William D. Jr. “Materials Science and Engineering: An Introduction”, 3rdedition, John Wiley and Sons, Inc. (1994), pp 349-350.
V.M. Segal, “Materials processing by simple shear”, Materials Science and Engineering, A197, 1995, pp. 157-164. (The year is sufficiently early so that the month is not in issue.).
F. J. Humphreys et al., “Developing stable fine-grain microstructures by large strain deformation”, Phil. Trans. R. Soc. Lond. A, Jun. 15, 1999, vol. 357 #1756, pp. 1663-1681.
S. Ferrasse et al., “Texture evolution during equal channel angular extrusion Part I. Effect of route, number of passes and initial texture”, Materials Science and Engineering, vol. 368, Mar. 15, 2004, pp. 28-40.
V. M. Segal, “Equal channel angular extrusion: from macromechanics to structure formation”, Materials Science & Engineering A271, Nov. 1, 1999, pp. 322-333.
Ruslan Z. Valiev et al., “SPD-Processed Ultra-Fine Grained Ti Materials for Medical Applications”, Advanced Materials & Processes, Dec. 2003, pp. 33-34.
Segal et al., “Plastic Working of Metals by Simple Shear”, Russian Metall. vol. 1, pp. 99-105, 1991.
M. Furukawa et al., “Microhardness Measurements and the Hall-Petch Relationship in an Al-Mg Alloy with Submicrometer Grain Size”, Acta Mater. vol. 44, No. 11, pp. 4619-4629, 1996.
Yoshinori Iwahashi et al., “Microstructural Characteristics of Ultrafine-Grained Aluminum Produced Using Equal-Channel Angular Pressing”, Metallurgical and Materials Transactions, vol. 29A, pp. 2245-2252, Sep. 1998.
S. Ferrasse et al., “ECAE Targets with Sub-Micron Grain Structures Improve Sputtering Performance and Cost-of-Ownership”, Semiconductor Manufacturing, vol. 4, Issue 10, Oct. 2003, pp. 76-92.
R.Z. Valiev et al., “Bulk Nanostructured materials from severe plastic deformation”, Progress in Materials Science, vol. 45, 2000, pp. 103-189.
V. M. Segal et al., “Processes of Plastic Structure Formation”, Science and Engineering, 1994, published in Russia, Chapters 1, 3 and 4, with Statement in Accordance with 37 CFR 1.98(a)(3)(1).
Ferrasse et al., “Microstructure and Properties of Copper and Aluminum Alloy 3003 Heavily Worked by Equal Channel Angular Extrusion”, Metallurgical and Materials Transactions A, vol. 28A, Apr. 1997, pp. 1047-1057.
R.Z. Valiev et al., “Plastic deformation of alloys with submicron-grained structure”, Materials Science and Engineering, A137 (1991) pp. 35-40.
Alford Frank
Ferrasse Stephane
Segal Vladimir M.
Honeywell International , Inc.
King Roy
Morillo Janelle
Wells St. John P.S.
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