Methods of fabricating magnetoresistance sensors pinned by...

Metal working – Method of mechanical manufacture – Electrical device making

Reexamination Certificate

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C029S603070, C029S603130, C029S603140, C029S603150, C029S603160, C216S062000, C216S065000, C216S066000, C360S324100, C360S324110, C360S324120, C360S324200

Reexamination Certificate

active

07900342

ABSTRACT:
Magnetoresistance sensors with magnetic pinned layers that are pinned by anisotropic etch induced magnetic anisotropies and methods for fabricating the magnetoresistance sensors are provided. The method comprises forming a seed layer structure. The seed layer is etched to form an anisotropic etch along a top surface of the seed layer. A magnetic pinned layer is formed on the top surface of the seed layer structure. The anisotropic etch on the top surface of the seed layer structure induces a magnetic anisotropy in the magnetic pinned layer, which pins the magnetization of the magnetic pinned layer structure.

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