Etching a substrate: processes – Forming or treating article containing magnetically...
Reexamination Certificate
2006-07-04
2006-07-04
Ahmed, Shamim (Department: 1765)
Etching a substrate: processes
Forming or treating article containing magnetically...
C216S041000, C216S067000, C029S603130, C029S603140, C029S603150, C029S603180, C360S112000
Reexamination Certificate
active
07070698
ABSTRACT:
One illustrative method of fabricating magnetic write heads includes the acts of forming a pole tip structure at least partially over a magnetic shaping layer; forming non-magnetic materials around and over the pole tip structure; etching side shield voids within the non-magnetic materials adjacent the pole tip structure while leaving non-magnetic materials around the pole tip structure; electroplating side shield materials within the side shield voids; and forming, over the non-magnetic materials above the pole tip structure, trailing shield materials which connect with the side shield materials adjacent the pole tip structure. Preferably, the non-magnetic materials are etched with use of a reactive ion etching (RIE) process. For etching the side shield voids and electroplating the side shield materials, the method may include the additional acts of forming a stop layer over the non-magnetic materials; forming a resist layer over the stop layer; patterning side shield openings through the resist layer; etching the side shield voids in the non-magnetic materials with the patterned resist layer in place; removing the patterned resist layer; electroplating the side shield materials over the non-magnetic materials and within the side shield voids; and performing a chemical-mechanical polishing (CMP) until the stop layer is reached.
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Yasushi Kanai, Recording field analysis of narrow-track SPT head with side shields, tapered main pole, and tapered return path for 1 Tb/in2. IEEE Transactions on Magnetics, Jul. 2003, pp. 1955-1960, v39. n.4.
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Ahmed Shamim
Hitachi Global Storage Technologies - Netherlands B.V.
Oskorep, Esq. John J.
Rambod Nadar
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