Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2005-03-25
2008-09-02
Sugarman, Scott J. (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C257S678000, C438S024000
Reexamination Certificate
active
07420728
ABSTRACT:
Methods for making MEMS devices such as interferometric modulators involve selectively removing a sacrificial portion of a material to form an internal cavity, leaving behind a remaining portion of the material to form a post structure. The material may be blanket deposited and selectively altered to define sacrificial portions that are selectively removable relative to the remaining portions. Alternatively, a material layer can be laterally recessed away from openings in a covering layer. These methods may be used to make unreleased and released interferometric modulators.
REFERENCES:
patent: 2534846 (1950-12-01), Ambrose et al.
patent: 3358601 (1967-12-01), Cathey
patent: 3439973 (1969-04-01), Paul et al.
patent: 3443854 (1969-05-01), Weiss
patent: 3616312 (1971-10-01), McGriff et al.
patent: 3653741 (1972-04-01), Marks
patent: 3656836 (1972-04-01), de Cremoux et al.
patent: 3725868 (1973-04-01), Malmer, Jr. et al.
patent: 3813265 (1974-05-01), Marks
patent: 3955880 (1976-05-01), Lierke
patent: 4099854 (1978-07-01), Decker et al.
patent: 4196396 (1980-04-01), Smith
patent: 4228437 (1980-10-01), Shelton
patent: 4377324 (1983-03-01), Durand et al.
patent: 4389096 (1983-06-01), Hori et al.
patent: 4392711 (1983-07-01), Moraw et al.
patent: 4403248 (1983-09-01), te Velde
patent: 4441791 (1984-04-01), Hornbeck
patent: 4445050 (1984-04-01), Marks
patent: 4459182 (1984-07-01), te Velde
patent: 4482213 (1984-11-01), Piliavin et al.
patent: 4500171 (1985-02-01), Penz et al.
patent: 4519676 (1985-05-01), te Velde
patent: 4531126 (1985-07-01), Sadones
patent: 4566935 (1986-01-01), Hornbeck
patent: 4571603 (1986-02-01), Hornbeck et al.
patent: 4596992 (1986-06-01), Hornbeck
patent: 4615595 (1986-10-01), Hornbeck
patent: 4617608 (1986-10-01), Blonder et al.
patent: 4662746 (1987-05-01), Hornbeck
patent: 4663083 (1987-05-01), Marks
patent: 4681403 (1987-07-01), te Velde et al.
patent: 4710732 (1987-12-01), Hornbeck
patent: 4748366 (1988-05-01), Taylor
patent: 4786128 (1988-11-01), Birnbach
patent: 4790635 (1988-12-01), Apsley
patent: 4856863 (1989-08-01), Sampsell et al.
patent: 4859060 (1989-08-01), Kitagiri et al.
patent: 4900136 (1990-02-01), Goldburt et al.
patent: 4900395 (1990-02-01), Syverson et al.
patent: 4937496 (1990-06-01), Neiger et al.
patent: 4954789 (1990-09-01), Sampsell
patent: 4956619 (1990-09-01), Hornbeck
patent: 4965562 (1990-10-01), Verhulst
patent: 4982184 (1991-01-01), Kirkwood
patent: 5018256 (1991-05-01), Hornbeck
patent: 5022745 (1991-06-01), Zahowski et al.
patent: 5028939 (1991-07-01), Hornbeck et al.
patent: 5037173 (1991-08-01), Sampsell et al.
patent: 5044736 (1991-09-01), Jaskie et al.
patent: 5061049 (1991-10-01), Hornbeck
patent: 5075796 (1991-12-01), Schildkraut et al.
patent: 5078479 (1992-01-01), Vuilleumier
patent: 5079544 (1992-01-01), DeMond et al.
patent: 5083857 (1992-01-01), Hornbeck
patent: 5096279 (1992-03-01), Hornbeck et al.
patent: 5099353 (1992-03-01), Hornbeck
patent: 5124834 (1992-06-01), Cusano et al.
patent: 5136669 (1992-08-01), Gerdt
patent: 5142405 (1992-08-01), Hornbeck
patent: 5142414 (1992-08-01), Koehler
patent: 5153771 (1992-10-01), Link et al.
patent: 5162787 (1992-11-01), Thompson et al.
patent: 5168406 (1992-12-01), Nelson
patent: 5170156 (1992-12-01), DeMond et al.
patent: 5172262 (1992-12-01), Hornbeck
patent: 5179274 (1993-01-01), Sampsell
patent: 5192395 (1993-03-01), Boysel et al.
patent: 5192946 (1993-03-01), Thompson et al.
patent: 5206629 (1993-04-01), DeMond et al.
patent: 5212582 (1993-05-01), Nelson
patent: 5214419 (1993-05-01), DeMond et al.
patent: 5214420 (1993-05-01), Thompson et al.
patent: 5216537 (1993-06-01), Hornbeck
patent: 5226099 (1993-07-01), Mignardi et al.
patent: 5228013 (1993-07-01), Bik
patent: 5231532 (1993-07-01), Magel et al.
patent: 5233385 (1993-08-01), Sampsell
patent: 5233456 (1993-08-01), Nelson
patent: 5233459 (1993-08-01), Bozler et al.
patent: 5254980 (1993-10-01), Hendrix et al.
patent: 5272473 (1993-12-01), Thompson et al.
patent: 5278652 (1994-01-01), Urbanus et al.
patent: 5280277 (1994-01-01), Hornbeck
patent: 5287096 (1994-02-01), Thompson et al.
patent: 5293272 (1994-03-01), Jannson et al.
patent: 5296950 (1994-03-01), Lin et al.
patent: 5299041 (1994-03-01), Morin et al.
patent: 5305640 (1994-04-01), Boysel et al.
patent: 5311360 (1994-05-01), Bloom et al.
patent: 5312513 (1994-05-01), Florence et al.
patent: 5323002 (1994-06-01), Sampsell et al.
patent: 5324683 (1994-06-01), Fitch et al.
patent: 5325116 (1994-06-01), Sampsell
patent: 5326430 (1994-07-01), Cronin et al.
patent: 5327286 (1994-07-01), Sampsell et al.
patent: 5330617 (1994-07-01), Haond
patent: 5331454 (1994-07-01), Hornbeck
patent: 5339116 (1994-08-01), Urbanus et al.
patent: 5345328 (1994-09-01), Fritz et al.
patent: 5347377 (1994-09-01), Revelli, Jr. et al.
patent: 5355357 (1994-10-01), Yamamori et al.
patent: 5365283 (1994-11-01), Doherty et al.
patent: 5381232 (1995-01-01), van Wijk
patent: 5381253 (1995-01-01), Sharp et al.
patent: 5401983 (1995-03-01), Jokerst et al.
patent: 5411769 (1995-05-01), Hornbeck
patent: 5444566 (1995-08-01), Gale et al.
patent: 5446479 (1995-08-01), Thompson et al.
patent: 5448314 (1995-09-01), Heimbuch et al.
patent: 5452024 (1995-09-01), Sampsell
patent: 5454906 (1995-10-01), Baker et al.
patent: 5457493 (1995-10-01), Leddy et al.
patent: 5457566 (1995-10-01), Sampsell et al.
patent: 5459602 (1995-10-01), Sampsell
patent: 5459610 (1995-10-01), Bloom et al.
patent: 5461411 (1995-10-01), Florence et al.
patent: 5474865 (1995-12-01), Vasudev
patent: 5489952 (1996-02-01), Gove et al.
patent: 5497172 (1996-03-01), Doherty et al.
patent: 5497197 (1996-03-01), Gove et al.
patent: 5499037 (1996-03-01), Nakagawa et al.
patent: 5499062 (1996-03-01), Urbanus
patent: 5500635 (1996-03-01), Mott
patent: 5500761 (1996-03-01), Goossen et al.
patent: 5503952 (1996-04-01), Suzuki et al.
patent: 5506597 (1996-04-01), Thompson et al.
patent: 5515076 (1996-05-01), Thompson et al.
patent: 5517347 (1996-05-01), Sampsell
patent: 5523803 (1996-06-01), Urbanus et al.
patent: 5526051 (1996-06-01), Gove et al.
patent: 5526172 (1996-06-01), Kanack
patent: 5526327 (1996-06-01), Cordova, Jr.
patent: 5526688 (1996-06-01), Boysel et al.
patent: 5535047 (1996-07-01), Hornbeck
patent: 5548301 (1996-08-01), Kornher et al.
patent: 5551293 (1996-09-01), Boysel et al.
patent: 5552924 (1996-09-01), Tregilgas
patent: 5552925 (1996-09-01), Worley
patent: 5559358 (1996-09-01), Burns et al.
patent: 5563398 (1996-10-01), Sampsell
patent: 5567334 (1996-10-01), Baker et al.
patent: 5570135 (1996-10-01), Gove et al.
patent: 5579149 (1996-11-01), Moret et al.
patent: 5581272 (1996-12-01), Conner et al.
patent: 5583688 (1996-12-01), Hornbeck
patent: 5589852 (1996-12-01), Thompson et al.
patent: 5597736 (1997-01-01), Sampsell
patent: 5600383 (1997-02-01), Hornbeck
patent: 5602671 (1997-02-01), Hornbeck
patent: 5606441 (1997-02-01), Florence et al.
patent: 5608468 (1997-03-01), Gove et al.
patent: 5610438 (1997-03-01), Wallace et al.
patent: 5610624 (1997-03-01), Bhuva
patent: 5610625 (1997-03-01), Sampsell
patent: 5619059 (1997-04-01), Li et al.
patent: 5619365 (1997-04-01), Rhoades et al.
patent: 5619366 (1997-04-01), Rhoads et al.
patent: 5622814 (1997-04-01), Miyata et al.
patent: 5629790 (1997-05-01), Neukermans et al.
patent: 5633652 (1997-05-01), Kanbe et al.
patent: 5636052 (1997-06-01), Arney et al.
patent: 5636185 (1997-06-01), Brewer et al.
patent: 5638084 (1997-06-01), Kalt
patent: 5638946 (1997-06-01), Zavracky
patent: 5641391 (1997-06-01), Hunter et al.
patent: 5646768 (1997-07-01), Kaeiyama
patent: 5647819 (1997-07-01), Fujita et al.
patent: 5650834 (1997-07-01), Nakagawa et al.
patent: 5650881 (1997-07-01), Hornbeck
patent: 5654741 (1997-08-01), Sampsell et al.
patent: 5657099 (1997-08-01), Doherty et al.
patent: 5659374 (1997-08-01), Gale, Jr. et al.
patent: 5665997 (1997-09-01), Weaver et al.
patent: 5673139 (1997-09-01), Johnson
patent: 5674757 (1997-10-01), Kim
patent: 5683591 (1997-11-01), Offenberg
patent: 5703710 (1997-12-01), Brinkman et al.
patent: 5706022 (1998-01-01), Hato
patent: 5710656 (1998-01-01)
Arbuckle Brian W.
Floyd Philip D.
Tung Ming-Hau
IDC LLC
Knobbe Martens Olson & Bear LLP
Pinkney Dawayne A
Sugarman Scott J.
LandOfFree
Methods of fabricating interferometric modulators by... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Methods of fabricating interferometric modulators by..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Methods of fabricating interferometric modulators by... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3985643