Etching a substrate: processes – Nongaseous phase etching of substrate – Etching inorganic substrate
Reexamination Certificate
2008-07-08
2008-07-08
Vinh, Lan (Department: 1792)
Etching a substrate: processes
Nongaseous phase etching of substrate
Etching inorganic substrate
C216S099000, C216S103000, C438S745000
Reexamination Certificate
active
07396484
ABSTRACT:
Ophthalmic surgical blades are manufactured from either a single crystal or poly-crystalline material, preferably in the form of a wafer. The method comprises preparing the single crystal or poly-crystalline wafers by mounting them and etching trenches into the wafers using one of several processes. Methods for machining the trenches, which form the bevel blade surfaces, include a diamond blade saw, laser system, ultrasonic machine, a hot forge press and a router. Other processes include wet etching (isotropic and anisotropic) and dry etching (isotropic and anisotropic, including reactive ion etching), and combinations of these etching steps. The wafers are then placed in an etchant solution which isotropically etches the wafers in a uniform manner, such that layers of crystalline or poly-crystalline material are removed uniformly, producing single, double or multiple bevel blades. Nearly any angle can be machined into the wafer, and the machined angle remains after etching. The resulting radii of the blade edges is 5-500 nm, which is the same caliber as a diamond edged blade, but manufactured at a fraction of the cost. A range of radii may be 30 to 60 nm, with a specific implementation being about 40 nm. The blade profile may have an angle of, for example, about 60°. The ophthalmic surgical blades can be used for cataract and refractive surgical procedures, as well as microsurgical, biological and non-medical, non-biological purposes. Surgical and non-surgical blades and mechanical devices manufactured as described herein can also exhibit substantially smoother surfaces than metal blades.
REFERENCES:
patent: 3543402 (1970-12-01), Seager
patent: 3803963 (1974-04-01), Hunt
patent: 3831466 (1974-08-01), Hicks, Jr.
patent: 3834265 (1974-09-01), Tafapolsky
patent: 3857488 (1974-12-01), Le Cren
patent: 3894337 (1975-07-01), Jones
patent: 3942231 (1976-03-01), Whitaker
patent: 4091813 (1978-05-01), Shaw
patent: 4122602 (1978-10-01), Sastri
patent: 4219025 (1980-08-01), Johnson
patent: 4231371 (1980-11-01), Lipp
patent: 4232676 (1980-11-01), Herczog
patent: 4248231 (1981-02-01), Herczog
patent: 4318537 (1982-03-01), Dorman
patent: 4409659 (1983-10-01), Devine
patent: 4413970 (1983-11-01), Seng
patent: 4444102 (1984-04-01), Clark
patent: 4468282 (1984-08-01), Neukermans
patent: 4509651 (1985-04-01), Prindle
patent: 4534827 (1985-08-01), Henderson
patent: 4551192 (1985-11-01), Di Milia
patent: 4566465 (1986-01-01), Arhan et al.
patent: 4579022 (1986-04-01), Kasai
patent: 4581969 (1986-04-01), Kim
patent: 4587202 (1986-05-01), Borysko
patent: 4611400 (1986-09-01), Drake
patent: 4629373 (1986-12-01), Hall
patent: 4634496 (1987-01-01), Mase et al.
patent: 4671849 (1987-06-01), Chen
patent: 4686980 (1987-08-01), Williams et al.
patent: 4688570 (1987-08-01), Kramer
patent: 4697489 (1987-10-01), Kim
patent: 4719915 (1988-01-01), Porat et al.
patent: 4735202 (1988-04-01), Williams
patent: 4735920 (1988-04-01), Stephani et al.
patent: 4740410 (1988-04-01), Muller
patent: 4777096 (1988-10-01), Borysko
patent: 4790812 (1988-12-01), Hawkins, Jr. et al.
patent: 4793218 (1988-12-01), Jordan et al.
patent: 4798000 (1989-01-01), Bedner et al.
patent: 4808260 (1989-02-01), Sickafus
patent: 4846250 (1989-07-01), Bedner et al.
patent: 4850353 (1989-07-01), Stasz et al.
patent: 4862890 (1989-09-01), Stasz et al.
patent: 4872947 (1989-10-01), Wang et al.
patent: 4911782 (1990-03-01), Brown
patent: 4916002 (1990-04-01), Carver
patent: 4922903 (1990-05-01), Welch et al.
patent: 4934103 (1990-06-01), Campergue
patent: 4948461 (1990-08-01), Chatterjee
patent: 4955894 (1990-09-01), Herman
patent: 4958539 (1990-09-01), Stasz et al.
patent: 4980021 (1990-12-01), Kitamura
patent: 5019035 (1991-05-01), Missirlian et al.
patent: 5021364 (1991-06-01), Akamine et al.
patent: 5032243 (1991-07-01), Bache
patent: 5048191 (1991-09-01), Hahn
patent: 5056277 (1991-10-01), Wilson
patent: 5077901 (1992-01-01), Warner et al.
patent: 5082254 (1992-01-01), Hunnell
patent: 5100506 (1992-03-01), Sturtevant
patent: 5121660 (1992-06-01), Kramer
patent: 5142785 (1992-09-01), Grewal et al.
patent: 5166520 (1992-11-01), Prater
patent: 5176628 (1993-01-01), Charles et al.
patent: 5193311 (1993-03-01), Dawson
patent: 5201992 (1993-04-01), Marcus
patent: 5217477 (1993-06-01), Lager
patent: 5222967 (1993-06-01), Casebeer et al.
patent: 5258002 (1993-11-01), Jeffers
patent: 5266528 (1993-11-01), Yamada
patent: 5295305 (1994-03-01), Hahn
patent: 5317938 (1994-06-01), de Juan et al.
patent: 5342370 (1994-08-01), Simon et al.
patent: 5474532 (1995-12-01), Steppe
patent: 5562693 (1996-10-01), Devlin et al.
patent: 5579583 (1996-12-01), Mehregany
patent: 5609778 (1997-03-01), Pulaski et al.
patent: 5619889 (1997-04-01), Jones
patent: 5627109 (1997-05-01), Sassa et al.
patent: 5651782 (1997-07-01), Simon et al.
patent: 5683592 (1997-11-01), Bartholomew
patent: 5713915 (1998-02-01), Van Heugten
patent: 5728089 (1998-03-01), Lal et al.
patent: 5742026 (1998-04-01), Dickinson, Jr.
patent: 5842387 (1998-12-01), Marcus
patent: D405178 (1999-02-01), Dykes
patent: 5879326 (1999-03-01), Godshall
patent: 5888883 (1999-03-01), Sasaki
patent: 5893846 (1999-04-01), Bales et al.
patent: 5928161 (1999-07-01), Krulevitch
patent: 5928207 (1999-07-01), Pisano
patent: 5944717 (1999-08-01), Lee
patent: 5972154 (1999-10-01), Konya
patent: 5985217 (1999-11-01), Krulevitch
patent: 5993281 (1999-11-01), Musket
patent: 5998234 (1999-12-01), Murata
patent: 6003419 (1999-12-01), Irita
patent: 6032372 (2000-03-01), Dischler
patent: 6056764 (2000-05-01), Smith
patent: 6063712 (2000-05-01), Gilton et al.
patent: 6099543 (2000-08-01), Smith
patent: 6117347 (2000-09-01), Ishida
patent: 6124214 (2000-09-01), Hembree
patent: 6151786 (2000-11-01), Hellstern
patent: 6184109 (2001-02-01), Sasaki
patent: 6187210 (2001-02-01), Lebouitz
patent: 6205993 (2001-03-01), Zehavi et al.
patent: 6216561 (2001-04-01), Dischler
patent: RE37304 (2001-07-01), Van Heugten
patent: 6253755 (2001-07-01), Wark
patent: 6256533 (2001-07-01), Yuhakov et al.
patent: 6260280 (2001-07-01), Rapisardi
patent: 6293270 (2001-09-01), Okazaki
patent: 6294439 (2001-09-01), Sasaki
patent: 6312212 (2001-11-01), Burlew, Jr.
patent: 6312612 (2001-11-01), Sherman
patent: 6319474 (2001-11-01), Krulevitch
patent: 6325704 (2001-12-01), Brown
patent: 6327784 (2001-12-01), Altena
patent: 6334856 (2002-01-01), Allen
patent: 6358261 (2002-03-01), Chan et al.
patent: 6358262 (2002-03-01), Chan et al.
patent: 6391793 (2002-05-01), Lee et al.
patent: 6401580 (2002-06-01), Akram et al.
patent: 6406638 (2002-06-01), Stoeber et al.
patent: 6420245 (2002-07-01), Manor
patent: 6440096 (2002-08-01), Lastovich et al.
patent: 6451039 (2002-09-01), Rickey, Jr. et al.
patent: 6482219 (2002-11-01), Bonnet
patent: 6533949 (2003-03-01), Yeshurun et al.
patent: 6554840 (2003-04-01), Matsutani et al.
patent: 6555447 (2003-04-01), Weishauss et al.
patent: 6562698 (2003-05-01), Manor
patent: 6569175 (2003-05-01), Robinson
patent: 6578458 (2003-06-01), Akram et al.
patent: 6578567 (2003-06-01), Oh et al.
patent: 6599178 (2003-07-01), Gluche et al.
patent: 6607966 (2003-08-01), Figura et al.
patent: 6615496 (2003-09-01), Fleming et al.
patent: 6623501 (2003-09-01), Heller et al.
patent: 6687990 (2004-02-01), Akram et al.
patent: 2002/0020688 (2002-02-01), Sherman et al.
patent: 2002/0026205 (2002-02-01), Matsutani et al.
patent: 2002/0078576 (2002-06-01), Carr et al.
patent: 2002/0142182 (2002-10-01), Peker et al.
patent: 2002/0178883 (2002-12-01), Yamamoto
patent: 2002/0185121 (2002-12-01), Farnworth et al.
patent: 2002/0193817 (2002-12-01), Lal et al.
patent: 2002/0194968 (2002-12-01), Akram et al.
patent: 2003/0100143 (2003-05-01), Mulligan et al.
patent: 2003/0171000 (2003-09-01), Chung et al.
patent: 2003/0199165 (2003-10-01), Keenan et al.
patent: 2003/0208911 (2003-11-01), Fleming et al.
patent: 3526951 (1987-01-01), None
patent: 1 092 515 (2001-04-01), None
patent: 1393611 (1975-05-01), None
patent: 61210179 (1986-09-01), None
patent: 63092345 (1990-09-01), None
patent: 8085018 (1996-04-01), None
patent: WO-86/02868 (1986-05-01), No
Chavez Susan M.
Daskal Vadim M.
Hughes James Joseph
Keenan Joseph F.
Kiss Attila E.
Becton Dickinson and Company
Murtha James J.
Roylance Abrams Berdo & Goodman LLP
Vinh Lan
LandOfFree
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