Methods of determining quality of a light source

Details Methods of determining quality of a light source Methods of determining quality of a light source

2006-07-20

2010-06-15

Le, Vu (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

C356S012000, C382S312000

Reexamination Certificate

active

07738692

ABSTRACT:
Methods for determining a quality of a light source applied to a photolithographic process are provided. An image sensor array is exposed to a light from a light source. Addresses and respective intensities corresponding to a plurality of locations on a pupil map representing intensity of the light from on the image sensor array. At least one of an inner curve and an outer curve of the pupil map is defined based upon the collected addresses and respective intensities. The light source is applied to a photolithographic process if the addresses have a predetermined pattern relative to the at least one of the inner curve and the outer curve.

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