Methods of correcting optically generated errors in an electro-o

Details Methods of correcting optically generated errors in an electro-o Methods of correcting optically generated errors in an electro-o

1993-10-13

1996-05-14

Boudreau, Leo H.

Image analysis

Applications

Surface texture or roughness measuring

382309, 356371, 356394, G06K 900

Patent

active

055175759

ABSTRACT:
Methods of correcting optically generated errors in images formed of test object surface profiles include the use of a bias image to correct errors resulting from problems associated with components of the gauging system. The bias image is also useful for correcting errors resulting from the nature of the test object surface. Further methods also include the use of a mask to selectively vary the amount of radiation that is used across the test object surface when gauging the surface profile. The mask effectively uniformly irradiates the test object surface to correct errors caused by irregular or extreme surface contours or coloration in the test object surface.

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