Methods of compensating lens heating, lithographic...

Details Methods of compensating lens heating, lithographic... Methods of compensating lens heating, lithographic...

2008-03-26

2010-12-21

Kim, Peter B (Department: 2882)

Photocopying

Projection printing and copying cameras

Distortion introducing or rectifying

Reexamination Certificate

active

07855776

ABSTRACT:
Embodiments relate to compensating for lens heating, lithographic projection system and photo mask. Accordingly, lens heating is compensated by providing a layout pattern including a regular pattern being arranged substantially symmetrical in a first region and a sub-resolution pattern including a plurality of sub-resolution structural elements, wherein the sub-resolution pattern in a second region, so as to minimize non-homogenous lens heating of a projection apparatus in case of a lithographic projection.

REFERENCES:
patent: 2003021914 (2003-01-01), None

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