Methods of characterizing similarity or consistency in a set...

Details Methods of characterizing similarity or consistency in a set... Methods of characterizing similarity or consistency in a set...

2011-03-29

2011-03-29

Mathews, Alan A (Department: 2882)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S072000, C355S077000, C356S237500

Reexamination Certificate

active

07916275

ABSTRACT:
A method of characterizing the similarity between entities in a set of entities, wherein an entity is selected from substrate layers, substrate fields and substrates. Including determining positions at a plurality of measurement points per entity for providing position data; computing a correlation coefficient for each of a plurality of combinations of entities from the entity set, the correlation coefficients being based on the position data and being representative of the correlation between the associated combination of entities; comparing the correlation coefficients to a threshold amount to determine the extent of similarity between the entities. The invention also relates to a similar method incorporating determining an average value of the computed correlation coefficients, the average value providing a measure of the consistency.

REFERENCES:
patent: 5191200 (1993-03-01), van der Werf et al.
patent: 6521385 (2003-02-01), Yoshida et al.
patent: 2003/0170552 (2003-09-01), Miyashita et al.
patent: 2006/0279720 (2006-12-01), Sekigawa et al.
patent: 2008/0106714 (2008-05-01), Okita
De Mol et al., “Methods of Characterizing Similarity Between Measurements on Entities, Computer Programs Product and Data Carrier”, U.S. Appl. No. 12/233,484, filed Sep. 18, 2008.

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