Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2005-07-11
2009-08-25
Bahta, Kidest (Department: 2123)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C702S182000
Reexamination Certificate
active
07580767
ABSTRACT:
One aspect of the present invention is a method of monitoring processes, optimizing processes, and diagnosing problems in the performance of a process tool for processing a workpiece. Another aspect of the present invention is a system configured for monitoring processes, optimizing processes, and diagnosing problems in the performance of a process tool for processing a workpiece. One embodiment of the present invention includes a software program that can be implemented in a computer for optimizing the performance of a process tool for processing a workpiece.
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Freed Mason L.
Krüger Michiel V. P.
MacDonald Paul Douglas
Spanos Costas J.
Welch Michael
Bahta Kidest
Isenberg Joshua D.
JDI Patent
KLA-Tencor Corporation
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