Methods of and apparatus for handling semiconductor devices

Details Methods of and apparatus for handling semiconductor devices Methods of and apparatus for handling semiconductor devices

1983-12-21

1985-12-03

Wayner, William E.

Material or article handling

Horizontally swinging load support

Swinging about pivot

414225, 249 68, A23G 900

Patent

active

045563624

ABSTRACT:
Apparatus (11) for handling articles (12), such as semiconductor devices, temporarily mounted to an adhesively coated surface of a diaphragm (29) of a mounting frame (21) includes an index table (31) for positioning a selected one of the articles (12) at a pickup axis (34). The article (12) is removed from adhesive contact with the diaphragm (29) by first engaging the underside of the diaphragm with spaced support pins (72) and urging the engaged portions of the diaphragm and the selected article upward while pulling adjacent regions of the diaphragm out of contact with the article by means of an applied vacuum. Then a vacuum tip (112) moves downward toward the selected article as supported in its original orientation in a position raised above a plane of an array of the articles. As the vacuum tip (112) engages the selected article, a central pushpin (78) urges the device out of supportive relationship with the support pins (72) and into contact with the vacuum tip (112) to effect a removal of the article (12) from the diaphragm (29) without tilting the article out of its original orientation.

REFERENCES:
patent: 3377653 (1968-04-01), Buonaiuto
patent: 3893644 (1975-07-01), Drazick

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