Methods for treating wafers on assembly carriers

Abrading – Abrading process – Glass or stone abrading

Reexamination Certificate

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Details

C156S080000, C451S053000, C451S063000

Reexamination Certificate

active

07918714

ABSTRACT:
A method and a device for treating wafers on assembly carriers is disclosed. A wafer to be treated can be fixed on a liquid film that is located between the front side of the wafer and the assembly carrier by freezing of the film.

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Tong, Q.-Y., et al., “Semiconductor Wafer Bonding,” 1999, pp. 1-6, John Wiley & Sons, Inc., Hoboken, NJ, USA.

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