Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate
2004-07-29
2009-08-25
Parker, Frederick (Department: 1792)
Coating processes
Coating by vapor, gas, or smoke
C427S250000, C427S295000, C427S127000
Reexamination Certificate
active
07579042
ABSTRACT:
Magnetic tunnel junctions and method for making the magnetic tunnel junctions are provided. The magnetic tunnel junctions are characterized by a tunnel barrier oxide layer sandwiched between two ferromagnetic layers. The methods used to fabricate the magnetic tunnel junctions are capable of completely and selectively oxidizing a tunnel junction precursor material using an oxidizing gas containing a mixture of gases to provide a tunnel junction oxide without oxidizing the adjacent ferromagnetic materials. In some embodiments the gas mixture is a mixture of CO and CO2or a mixture of H2and H2O.
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Chang Y. Austin
Ladwig Peter F.
Yang Jianhua J.
Foley & Lardner LLP
Parker Frederick
Stouffer Kelly M
Wisconsin Alumni Research Foundation
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