Methods for the fabrication of microstructure arrays

Details Methods for the fabrication of microstructure arrays Methods for the fabrication of microstructure arrays

1993-11-03

1995-07-25

Powell, William

Etching a substrate: processes

Forming or treating optical article

Lens

216 13, 216 48, B44C 122, B29C 3700, C03C 1500

Patent

active

054358876

ABSTRACT:
A method is provided for fabricating smoothly-curved microstructures such as microlenses on a substrate and certain unique microstructures and microstructure arrays obtained through use of such techniques are also provided. The substrate may be smoothly-curved and the bases of the microstructures may have a variety of shapes. The method takes advantage of the surface tension of a liquid to form droplets having a desired shape over high surface energy portions or area of the substrate, which substrate has been previously patterned to have areas with surface energies which are above and below, respectively, the surface tension of a liquid deposited to form the droplets. The formed droplets may then be cured to create the desired microstructures.

REFERENCES:
patent: 5198073 (1993-03-01), Ishibashi
patent: 5286338 (1994-02-01), Feldblum et al.
T. Chia and L. L. Hench, Micro-Arrays by Laser Densification of Gel-Silica Matrices, 1992, pp. 215-226, SPIE vol. 1758 Sol-Gel Optics II.

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