Methods for spin drying a workpiece

Details Methods for spin drying a workpiece Methods for spin drying a workpiece

1999-07-26

2000-02-29

Gravini, Stephen

Drying and gas or vapor contact with solids

Process

By centrifugal force

34325, F26B 508

Patent

active

060293691

ABSTRACT:
A spin dryer assembly for drying workpieces such as semiconductor wafers includes a workpiece platform for receiving a workpiece to be dried. A motor is coupled to and spins the platform to effect removal of water and particulates from the workpiece. Gripping fingers are pivotally mounted around the platform and securely grip the workpiece during drying. Spring loaded plungers maintain the gripping fingers in a secured position during drying. A cam ring is vertically movable into and out of contact with the gripping fingers to bias the gripping portions of the fingers outwardly to a release position after drying.

REFERENCES:
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patent: 5667535 (1997-09-01), Kasahara
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patent: 5784797 (1998-07-01), Curtis et al.
patent: 5829156 (1998-11-01), Shibasaki et al.
patent: 5873177 (1999-02-01), Honda et al.
patent: 5884412 (1999-03-01), Tietz et al.

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