Methods for releasably attaching support members to...

Adhesive bonding and miscellaneous chemical manufacture – Methods – Surface bonding and/or assembly therefor

Reexamination Certificate

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Details

C156S230000, C156S272200, C156S275700, C438S113000, C438S118000, C438S458000, C438S460000, C438S464000

Reexamination Certificate

active

11185045

ABSTRACT:
Methods for releasably attaching support members to microfeature workpieces and microfeature assemblies formed using such methods. A method for processing a microfeature workpiece in accordance with one embodiment includes applying adhesive material to a non-active portion on a first side of a workpiece. The workpiece can include a first active portion and a second active portion separated from each other at least in part by the non-active portion. The method continues by adhesively attaching the first side of the workpiece to a first support member, and releasably attaching the second side of the workpiece to a second support member. The method further includes separating the first active portion from the second active portion while the workpiece is attached to the second support member by cutting through the first support member and the non-active portion of the workpiece. The separation process removes at least approximately all the adhesive material from the non-active portion of the workpiece.

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Sumitomo 3M Ltd., Product Description, H-WSS (Wafer Support System) For Ultra Thin Wafer Backgrinding, 2 pages, Sep. 1, 2003.

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