Optical: systems and elements – Having significant infrared or ultraviolet property – Having polarizing element
Reexamination Certificate
2006-07-04
2006-07-04
Shafer, Ricky D. (Department: 2872)
Optical: systems and elements
Having significant infrared or ultraviolet property
Having polarizing element
C359S490020, C359S490020, C359S506000, C359S727000, C359S730000, C359S732000, C359S900000
Reexamination Certificate
active
07072102
ABSTRACT:
An optical system includes multiple cubic crystalline optical elements and one or more uniaxial birefringent elements in which the crystal lattices of the cubic crystalline optical elements are oriented with respect to each other to reduce the effects of intrinsic birefringence and produce a system with reduced retardance. The net retardance of the system is reduced by the cancellation of retardance contributions from the multiple cubic crystalline optical elements and the uniaxial birefringent element. The optical system may be used in a photolithography tool to pattern substrates such as semiconductor substrates and thereby produce semiconductor devices.
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ASML Netherlands B.V.
Pillsbury Winthrop Shaw & Pittman LLP
Shafer Ricky D.
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