Methods for producing waveguides

Details Methods for producing waveguides Methods for producing waveguides

2005-07-05

2005-07-05

Lam, Cathy F. (Department: 1775)

Optical waveguides

Planar optical waveguide

C385S130000, C385S132000

Reexamination Certificate

active

06915054

ABSTRACT:
Methods for producing waveguides are disclosed. In one embodiment, a waveguide is produced by depositing a first metal layer on a substrate, depositing a sacrificial material on the first metal layer, depositing a second metal layer on the sacrificial material, the second metal layer contacting the first metal layer and defining therebetween a cavity for the waveguide, the cavity filled with the sacrificial material, and removing the sacrificial material.

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