Methods for producing MEMS with protective coatings using...

Details Methods for producing MEMS with protective coatings using... Methods for producing MEMS with protective coatings using...

2006-03-02

2008-11-11

Choi, William C (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C438S053000

Reexamination Certificate

active

07450295

ABSTRACT:
Methods of forming a protective coating on one or more surfaces of a microelectromechanical device are disclosed comprising the steps of forming a composite layer of a sacrificial material and a protective material, and selectively etching the sacrificial material to form a protective coating. The protective coatings of the invention preferably improve one or more aspects of the performance of the microelectromechanical devices in which they are incorporated. Also disclosed are microelectromechanical devices formed by methods of the invention, and visual display devices incorporating such devices.

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