Methods for preparing high-purity molybdenum or tungsten powder

Details Methods for preparing high-purity molybdenum or tungsten powder Methods for preparing high-purity molybdenum or tungsten powder

1987-09-04

1988-08-09

Stoll, Robert L.

Chemistry of inorganic compounds

Treating mixture to obtain metal containing compound

Group vib metal

423DIG14, 75 05AB, 75101BE, 75101R, 75121, 210688, C01G 3902, C01G 4102, C22B 3434, C22B 3436

Patent

active

047626950

ABSTRACT:
High-purity molybdenum or tungsten powder can be produced by a process comprising (a) decomposing a powder or an oxide powder of molybdenum or tungsten with hydrogen peroxide water; (b) bringing the resulting aqueous solution of molybdenum or tungsten into contact with a cation exchange resin; (c) concentrating the aqueous solution; and (d) reducing a concentrated solid material. By omitting reducing step (d), one can obtain high-purity molybdenum or tungsten oxide powders. Because the Mo and W powders and MoO.sub.3 and WO.sub.3 powders prepared by this invention are of an extremely high purity, they are useful as materials for targets of VLSI elements.

REFERENCES:
patent: 3231329 (1966-01-01), Weiss et al.
patent: 3519385 (1970-07-01), Hurst et al.
patent: 4046852 (1977-09-01), Vertes et al.
patent: 4101309 (1978-07-01), Koseki et al.

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